Page 3 - Nanosystem Fabrication Facility 2018
P. 3

Contents



















                  Introduction                                                        2




                  Mask Making Module                                                  4



                  Photolithography Module                                             6




                  Wet Etching and CMP Module                                          8




                  Dry Etching and Sputtering Module                                   10



                  Thermal Process and Implantation Module                             12




                  Metrology                                                           14



                  User Training                                                       16


































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