Page 5 - Nanosystem Fabrication Facility 2018
P. 5

In 2007, 200 square meters of laboratory space in the Enterprise Center were
                                           allocated to NFF. This laboratory space was subsequently installed with metallization
                                           equipment, basic photolithography equipment and an E-beam lithography system.


                                           In 2018, the Deep RIE Process Center was established in the NFF. This laboratory
                                           was installed with two ICP DRIE systems and metrology equipment.






























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